By Seong H. Kim, Michael T. Dugger, Kash L. Mittal

ISBN-10: 9004190953

ISBN-13: 9789004190955

Phenomena linked to the adhesion interplay of surfaces were a severe element of micro- and nanosystem improvement and function because the first MicroElectroMechanicalSystems(MEMS) have been fabricated. those phenomena are ubiquitous in nature and are found in all structures, even though MEMS units are fairly delicate to their results because of their small dimension and constrained actuation strength which can beRead more...

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**Extra info for Adhesion Aspects in MEMS/NEMS**

**Sample text**

Circular Approximation with Pythagorean Relation By comparing the results from the exact solution to the results from the circular approximation, we can determine the degree to which the simpler latter method is valid. Figure 5(b) shows that the external radius (r1 ) agrees well with rm for D. B. Asay et al. / Adhesion Aspects in MEMS/NEMS (2010) 25–44 37 Figure 5. (a) Meniscus shape of n-pentanol obtained with the Laplace–Young exact solution for various p/psat . Also shown are the adsorbed n-pentanol layers on the tip and the substrate.

In this condition, PLJa is given by PLJa = 2πRa γρp, (20) where Ra , ρ and p are mean asperity radius, asperity density, and probability of contacting asperity out of the entire asperity density ρ. , 2πRa γρ z0 A 1− σ 6πσ 3 6 . (21) Since σ in inequality (21) is a large-scale asperity spacing, (z0 /σ )6 1. In contrast, since the small-scale asperity spacing can be considered to be nearly equal to z0 , equation (19) holds. Therefore, by substituting equation (19) into inequality (21), we can obtain the condition where PLJ plays a dominant role in attractive pressure compared to PLJa , as follows: σ 4 z02 3 πRa ρ 1/3 .

Xiao and Qian assumed that the meniscus edges met with the tip and substrate surfaces with finite contact angles and estimated the size of the meniscus using the Kelvin equation at a given vapor partial pressure [5]. This model shows some vapor pressure dependence of the capillary force, but the exact shape deviates from the experimental data. It should be noted that on clean silicon oxide surfaces, the contact angle of water and short-chain alcohols is near zero (completely wetting). Therefore, assuming a finite contact angle at the meniscus edge is inappropriate especially for water and alcohol condensation on hydrophilic surfaces.

### Adhesion Aspects in MEMS/NEMS by Seong H. Kim, Michael T. Dugger, Kash L. Mittal

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